11/10/2011	9:49:49 AM	Main Vac valve closed
11/10/2011	9:56:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	9:56:30 AM	Recipe started at 9:56 AM
11/10/2011	9:56:30 AM	Helium valve closed
11/10/2011	9:56:30 AM	H2 valve closed
11/10/2011	9:56:30 AM	BCl3 valve closed
11/10/2011	9:56:30 AM	PH3 valve closed
11/10/2011	9:56:30 AM	SiCl4 pre valve closed
11/10/2011	9:56:30 AM	SiCl4 post valve closed
11/10/2011	9:56:30 AM	Main Vac valve closed
11/10/2011	9:56:30 AM	Bubbler valve closed
11/10/2011	9:56:30 AM	Bypass valve opened
11/10/2011	9:56:30 AM	Helium MFC set to  0.000000
11/10/2011	9:56:30 AM	H2 MFC set to  0.000000
11/10/2011	9:56:30 AM	BCl3 MFC set to  0.000000
11/10/2011	9:56:30 AM	PHl3 MFC set to  0.000000
11/10/2011	9:56:30 AM	SiCl4 MFC set to  0.000000
11/10/2011	9:56:30 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	9:56:30 AM	Tube furnace set to 0
11/10/2011	9:58:29 AM	Helium valve closed
11/10/2011	9:58:29 AM	H2 valve closed
11/10/2011	9:58:29 AM	BCl3 valve closed
11/10/2011	9:58:29 AM	PH3 valve closed
11/10/2011	9:58:29 AM	SiCl4 pre valve closed
11/10/2011	9:58:29 AM	SiCl4 post valve closed
11/10/2011	9:58:29 AM	Main Vac valve closed
11/10/2011	9:58:29 AM	Bubbler valve closed
11/10/2011	9:58:29 AM	Bypass valve opened
11/10/2011	9:58:29 AM	Helium MFC set to  0.000000
11/10/2011	9:58:29 AM	H2 MFC set to  0.000000
11/10/2011	9:58:29 AM	BCl3 MFC set to  0.000000
11/10/2011	9:58:29 AM	PHl3 MFC set to  0.000000
11/10/2011	9:58:29 AM	SiCl4 MFC set to  0.000000
11/10/2011	9:58:29 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	9:58:29 AM	Tube furnace set to 0
11/10/2011	9:59:29 AM	Helium valve closed
11/10/2011	9:59:29 AM	H2 valve closed
11/10/2011	9:59:29 AM	BCl3 valve closed
11/10/2011	9:59:29 AM	PH3 valve closed
11/10/2011	9:59:29 AM	SiCl4 pre valve closed
11/10/2011	9:59:29 AM	SiCl4 post valve closed
11/10/2011	9:59:29 AM	Bypass valve closed
11/10/2011	9:59:29 AM	Bubbler valve closed
11/10/2011	9:59:29 AM	Main Vac valve opened
11/10/2011	9:59:29 AM	Helium MFC set to  0.000000
11/10/2011	9:59:29 AM	H2 MFC set to  0.000000
11/10/2011	9:59:29 AM	BCl3 MFC set to  0.000000
11/10/2011	9:59:29 AM	PHl3 MFC set to  0.000000
11/10/2011	9:59:29 AM	SiCl4 MFC set to  0.000000
11/10/2011	9:59:29 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	9:59:30 AM	Tube furnace set to 0
11/10/2011	9:59:31 AM	Run finished at 9:59 AM
11/10/2011	9:59:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	10:02:02 AM	Main Vac valve closed
11/10/2011	10:04:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	10:04:17 AM	Recipe started at 10:04 AM
11/10/2011	10:04:17 AM	Helium valve closed
11/10/2011	10:04:17 AM	H2 valve closed
11/10/2011	10:04:17 AM	BCl3 valve closed
11/10/2011	10:04:17 AM	PH3 valve closed
11/10/2011	10:04:17 AM	SiCl4 pre valve closed
11/10/2011	10:04:17 AM	SiCl4 post valve closed
11/10/2011	10:04:17 AM	Main Vac valve closed
11/10/2011	10:04:17 AM	Bubbler valve closed
11/10/2011	10:04:17 AM	Bypass valve opened
11/10/2011	10:04:17 AM	Helium MFC set to  0.000000
11/10/2011	10:04:17 AM	H2 MFC set to  0.000000
11/10/2011	10:04:17 AM	BCl3 MFC set to  0.000000
11/10/2011	10:04:17 AM	PHl3 MFC set to  0.000000
11/10/2011	10:04:17 AM	SiCl4 MFC set to  0.000000
11/10/2011	10:04:17 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	10:04:17 AM	Tube furnace set to 0
11/10/2011	10:06:20 AM	Helium valve closed
11/10/2011	10:06:20 AM	H2 valve closed
11/10/2011	10:06:20 AM	BCl3 valve closed
11/10/2011	10:06:20 AM	PH3 valve closed
11/10/2011	10:06:20 AM	SiCl4 pre valve closed
11/10/2011	10:06:20 AM	SiCl4 post valve closed
11/10/2011	10:06:20 AM	Main Vac valve closed
11/10/2011	10:06:20 AM	Bubbler valve closed
11/10/2011	10:06:20 AM	Bypass valve opened
11/10/2011	10:06:20 AM	Helium MFC set to  0.000000
11/10/2011	10:06:20 AM	H2 MFC set to  0.000000
11/10/2011	10:06:20 AM	BCl3 MFC set to  0.000000
11/10/2011	10:06:20 AM	PHl3 MFC set to  0.000000
11/10/2011	10:06:20 AM	SiCl4 MFC set to  0.000000
11/10/2011	10:06:20 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	10:06:20 AM	Tube furnace set to 0
11/10/2011	10:07:20 AM	Helium valve closed
11/10/2011	10:07:20 AM	H2 valve closed
11/10/2011	10:07:20 AM	BCl3 valve closed
11/10/2011	10:07:20 AM	PH3 valve closed
11/10/2011	10:07:20 AM	SiCl4 pre valve closed
11/10/2011	10:07:21 AM	SiCl4 post valve closed
11/10/2011	10:07:21 AM	Bypass valve closed
11/10/2011	10:07:21 AM	Bubbler valve closed
11/10/2011	10:07:21 AM	Main Vac valve opened
11/10/2011	10:07:21 AM	Helium MFC set to  0.000000
11/10/2011	10:07:21 AM	H2 MFC set to  0.000000
11/10/2011	10:07:21 AM	BCl3 MFC set to  0.000000
11/10/2011	10:07:21 AM	PHl3 MFC set to  0.000000
11/10/2011	10:07:21 AM	SiCl4 MFC set to  0.000000
11/10/2011	10:07:21 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	10:07:21 AM	Tube furnace set to 0
11/10/2011	10:07:22 AM	Run finished at 10:07 AM
11/10/2011	10:07:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	10:35:09 AM	Helium MFC set to  500.000000
11/10/2011	10:35:14 AM	Main Vac valve closed
11/10/2011	10:35:15 AM	Helium valve opened
11/10/2011	10:36:06 AM	Helium valve closed
11/10/2011	10:36:07 AM	Bypass valve opened
11/10/2011	10:37:11 AM	Bypass valve closed
11/10/2011	10:37:12 AM	Main Vac valve opened
11/10/2011	11:15:21 AM	Main Vac valve closed
11/10/2011	11:15:52 AM	Main Vac valve opened
11/10/2011	11:21:47 AM	Recipe started at 11:21 AM
11/10/2011	11:21:47 AM	Helium valve closed
11/10/2011	11:21:47 AM	H2 valve closed
11/10/2011	11:21:47 AM	BCl3 valve closed
11/10/2011	11:21:47 AM	PH3 valve closed
11/10/2011	11:21:47 AM	SiCl4 pre valve closed
11/10/2011	11:21:47 AM	SiCl4 post valve closed
11/10/2011	11:21:47 AM	Main Vac valve closed
11/10/2011	11:21:47 AM	Bypass valve closed
11/10/2011	11:21:47 AM	Bubbler valve closed
11/10/2011	11:21:47 AM	Helium MFC set to  0.000000
11/10/2011	11:21:47 AM	H2 MFC set to  0.000000
11/10/2011	11:21:47 AM	BCl3 MFC set to  0.000000
11/10/2011	11:21:47 AM	PHl3 MFC set to  0.000000
11/10/2011	11:21:47 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:21:47 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:21:47 AM	Tube furnace set to 0
11/10/2011	11:21:50 AM	Helium valve closed
11/10/2011	11:21:50 AM	BCl3 valve closed
11/10/2011	11:21:50 AM	PH3 valve closed
11/10/2011	11:21:50 AM	SiCl4 pre valve closed
11/10/2011	11:21:50 AM	SiCl4 post valve closed
11/10/2011	11:21:50 AM	Main Vac valve closed
11/10/2011	11:21:50 AM	Bypass valve closed
11/10/2011	11:21:50 AM	Bubbler valve closed
11/10/2011	11:21:50 AM	H2 valve opened
11/10/2011	11:21:50 AM	Helium MFC set to  0.000000
11/10/2011	11:21:50 AM	H2 MFC set to  500.000000
11/10/2011	11:21:50 AM	BCl3 MFC set to  0.000000
11/10/2011	11:21:50 AM	PHl3 MFC set to  0.000000
11/10/2011	11:21:50 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:21:50 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:21:51 AM	Tube furnace set to 100
11/10/2011	11:22:59 AM	Helium valve closed
11/10/2011	11:22:59 AM	BCl3 valve closed
11/10/2011	11:22:59 AM	PH3 valve closed
11/10/2011	11:22:59 AM	SiCl4 pre valve closed
11/10/2011	11:22:59 AM	SiCl4 post valve closed
11/10/2011	11:22:59 AM	Main Vac valve closed
11/10/2011	11:22:59 AM	Bypass valve closed
11/10/2011	11:22:59 AM	H2 valve opened
11/10/2011	11:22:59 AM	Bubbler valve opened
11/10/2011	11:22:59 AM	Helium MFC set to  0.000000
11/10/2011	11:22:59 AM	H2 MFC set to  500.000000
11/10/2011	11:22:59 AM	BCl3 MFC set to  0.000000
11/10/2011	11:22:59 AM	PHl3 MFC set to  0.000000
11/10/2011	11:22:59 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:22:59 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:22:59 AM	Tube furnace set to 1000
11/10/2011	11:23:00 AM	Helium valve closed
11/10/2011	11:23:00 AM	BCl3 valve closed
11/10/2011	11:23:00 AM	PH3 valve closed
11/10/2011	11:23:00 AM	SiCl4 pre valve closed
11/10/2011	11:23:00 AM	SiCl4 post valve closed
11/10/2011	11:23:00 AM	Main Vac valve closed
11/10/2011	11:23:00 AM	Bypass valve closed
11/10/2011	11:23:00 AM	H2 valve opened
11/10/2011	11:23:00 AM	Bubbler valve opened
11/10/2011	11:23:00 AM	Helium MFC set to  0.000000
11/10/2011	11:23:00 AM	H2 MFC set to  500.000000
11/10/2011	11:23:00 AM	BCl3 MFC set to  0.000000
11/10/2011	11:23:00 AM	PHl3 MFC set to  0.000000
11/10/2011	11:23:00 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:23:00 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:23:00 AM	Tube furnace set to 1000
11/10/2011	11:23:10 AM	Run aborted at 11:23 AM
11/10/2011	11:23:10 AM	Helium valve closed
11/10/2011	11:23:10 AM	H2 valve closed
11/10/2011	11:23:10 AM	BCl3 valve closed
11/10/2011	11:23:10 AM	PH3 valve closed
11/10/2011	11:23:10 AM	SiCl4 pre valve closed
11/10/2011	11:23:10 AM	SiCl4 post valve closed
11/10/2011	11:23:10 AM	Bypass valve closed
11/10/2011	11:23:10 AM	Main Vac valve closed
11/10/2011	11:23:10 AM	Bubbler valve closed
11/10/2011	11:23:10 AM	Helium MFC set to  0.000000
11/10/2011	11:23:10 AM	H2 MFC set to  0.000000
11/10/2011	11:23:10 AM	BCl3 MFC set to  0.000000
11/10/2011	11:23:10 AM	PHl3 MFC set to  0.000000
11/10/2011	11:23:10 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:23:10 AM	Tube furnace set to 0
11/10/2011	11:23:25 AM	Recipe started at 11:23 AM
11/10/2011	11:23:25 AM	Helium valve closed
11/10/2011	11:23:25 AM	H2 valve closed
11/10/2011	11:23:25 AM	BCl3 valve closed
11/10/2011	11:23:25 AM	PH3 valve closed
11/10/2011	11:23:25 AM	SiCl4 pre valve closed
11/10/2011	11:23:25 AM	SiCl4 post valve closed
11/10/2011	11:23:25 AM	Main Vac valve closed
11/10/2011	11:23:25 AM	Bypass valve closed
11/10/2011	11:23:25 AM	Bubbler valve closed
11/10/2011	11:23:25 AM	Helium MFC set to  0.000000
11/10/2011	11:23:25 AM	H2 MFC set to  0.000000
11/10/2011	11:23:25 AM	BCl3 MFC set to  0.000000
11/10/2011	11:23:25 AM	PHl3 MFC set to  0.000000
11/10/2011	11:23:25 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:23:25 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:23:25 AM	Tube furnace set to 0
11/10/2011	11:23:28 AM	Helium valve closed
11/10/2011	11:23:28 AM	BCl3 valve closed
11/10/2011	11:23:28 AM	PH3 valve closed
11/10/2011	11:23:28 AM	SiCl4 pre valve closed
11/10/2011	11:23:28 AM	SiCl4 post valve closed
11/10/2011	11:23:28 AM	Main Vac valve closed
11/10/2011	11:23:28 AM	Bypass valve closed
11/10/2011	11:23:28 AM	Bubbler valve closed
11/10/2011	11:23:28 AM	H2 valve opened
11/10/2011	11:23:28 AM	Helium MFC set to  0.000000
11/10/2011	11:23:28 AM	H2 MFC set to  500.000000
11/10/2011	11:23:28 AM	BCl3 MFC set to  0.000000
11/10/2011	11:23:28 AM	PHl3 MFC set to  0.000000
11/10/2011	11:23:28 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:23:28 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:23:28 AM	Tube furnace set to 100
11/10/2011	11:23:29 AM	Helium valve closed
11/10/2011	11:23:29 AM	BCl3 valve closed
11/10/2011	11:23:29 AM	PH3 valve closed
11/10/2011	11:23:29 AM	SiCl4 pre valve closed
11/10/2011	11:23:29 AM	SiCl4 post valve closed
11/10/2011	11:23:29 AM	Main Vac valve closed
11/10/2011	11:23:29 AM	Bypass valve closed
11/10/2011	11:23:29 AM	H2 valve opened
11/10/2011	11:23:29 AM	Bubbler valve opened
11/10/2011	11:23:29 AM	Helium MFC set to  0.000000
11/10/2011	11:23:29 AM	H2 MFC set to  500.000000
11/10/2011	11:23:29 AM	BCl3 MFC set to  0.000000
11/10/2011	11:23:29 AM	PHl3 MFC set to  0.000000
11/10/2011	11:23:29 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:23:29 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:23:29 AM	Tube furnace set to 1000
11/10/2011	11:23:30 AM	Helium valve closed
11/10/2011	11:23:30 AM	BCl3 valve closed
11/10/2011	11:23:30 AM	PH3 valve closed
11/10/2011	11:23:30 AM	SiCl4 pre valve closed
11/10/2011	11:23:30 AM	SiCl4 post valve closed
11/10/2011	11:23:30 AM	Main Vac valve closed
11/10/2011	11:23:30 AM	Bypass valve closed
11/10/2011	11:23:30 AM	H2 valve opened
11/10/2011	11:23:30 AM	Bubbler valve opened
11/10/2011	11:23:30 AM	Helium MFC set to  0.000000
11/10/2011	11:23:30 AM	H2 MFC set to  500.000000
11/10/2011	11:23:30 AM	BCl3 MFC set to  0.000000
11/10/2011	11:23:30 AM	PHl3 MFC set to  0.000000
11/10/2011	11:23:30 AM	SiCl4 MFC set to  0.000000
11/10/2011	11:23:30 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:23:30 AM	Tube furnace set to 1000
11/10/2011	11:45:30 AM	Helium valve closed
11/10/2011	11:45:30 AM	BCl3 valve closed
11/10/2011	11:45:30 AM	PH3 valve closed
11/10/2011	11:45:30 AM	Main Vac valve closed
11/10/2011	11:45:30 AM	Bypass valve closed
11/10/2011	11:45:30 AM	H2 valve opened
11/10/2011	11:45:30 AM	SiCl4 pre valve opened
11/10/2011	11:45:30 AM	SiCl4 post valve opened
11/10/2011	11:45:30 AM	Bubbler valve opened
11/10/2011	11:45:30 AM	Helium MFC set to  0.000000
11/10/2011	11:45:30 AM	H2 MFC set to  500.000000
11/10/2011	11:45:30 AM	BCl3 MFC set to  0.000000
11/10/2011	11:45:30 AM	PHl3 MFC set to  0.000000
11/10/2011	11:45:30 AM	SiCl4 MFC set to  32.000000
11/10/2011	11:45:30 AM	Bypass solenoid MFC set to  0.000000
11/10/2011	11:45:30 AM	Tube furnace set to 1000
11/10/2011	12:18:50 PM	Helium valve closed
11/10/2011	12:18:50 PM	BCl3 valve closed
11/10/2011	12:18:50 PM	PH3 valve closed
11/10/2011	12:18:50 PM	SiCl4 pre valve closed
11/10/2011	12:18:50 PM	SiCl4 post valve closed
11/10/2011	12:18:50 PM	Main Vac valve closed
11/10/2011	12:18:50 PM	Bypass valve closed
11/10/2011	12:18:50 PM	H2 valve opened
11/10/2011	12:18:50 PM	Bubbler valve opened
11/10/2011	12:18:50 PM	Helium MFC set to  0.000000
11/10/2011	12:18:50 PM	H2 MFC set to  500.000000
11/10/2011	12:18:50 PM	BCl3 MFC set to  0.000000
11/10/2011	12:18:50 PM	PHl3 MFC set to  0.000000
11/10/2011	12:18:50 PM	SiCl4 MFC set to  0.000000
11/10/2011	12:18:50 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	12:18:50 PM	Tube furnace set to 950
11/10/2011	12:23:50 PM	Helium valve closed
11/10/2011	12:23:50 PM	BCl3 valve closed
11/10/2011	12:23:50 PM	PH3 valve closed
11/10/2011	12:23:50 PM	SiCl4 pre valve closed
11/10/2011	12:23:50 PM	SiCl4 post valve closed
11/10/2011	12:23:50 PM	Main Vac valve closed
11/10/2011	12:23:50 PM	Bypass valve closed
11/10/2011	12:23:50 PM	H2 valve opened
11/10/2011	12:23:50 PM	Bubbler valve opened
11/10/2011	12:23:50 PM	Helium MFC set to  0.000000
11/10/2011	12:23:50 PM	H2 MFC set to  500.000000
11/10/2011	12:23:50 PM	BCl3 MFC set to  0.000000
11/10/2011	12:23:50 PM	PHl3 MFC set to  0.000000
11/10/2011	12:23:51 PM	SiCl4 MFC set to  0.000000
11/10/2011	12:23:51 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	12:23:51 PM	Tube furnace set to 750
11/10/2011	12:28:51 PM	Helium valve closed
11/10/2011	12:28:51 PM	BCl3 valve closed
11/10/2011	12:28:51 PM	PH3 valve closed
11/10/2011	12:28:51 PM	SiCl4 pre valve closed
11/10/2011	12:28:51 PM	SiCl4 post valve closed
11/10/2011	12:28:51 PM	Main Vac valve closed
11/10/2011	12:28:51 PM	Bypass valve closed
11/10/2011	12:28:51 PM	H2 valve opened
11/10/2011	12:28:51 PM	Bubbler valve opened
11/10/2011	12:28:51 PM	Helium MFC set to  0.000000
11/10/2011	12:28:51 PM	H2 MFC set to  500.000000
11/10/2011	12:28:51 PM	BCl3 MFC set to  0.000000
11/10/2011	12:28:51 PM	PHl3 MFC set to  0.000000
11/10/2011	12:28:51 PM	SiCl4 MFC set to  0.000000
11/10/2011	12:28:51 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	12:28:51 PM	Tube furnace set to 750
11/10/2011	12:33:51 PM	H2 valve closed
11/10/2011	12:33:51 PM	BCl3 valve closed
11/10/2011	12:33:51 PM	PH3 valve closed
11/10/2011	12:33:51 PM	SiCl4 pre valve closed
11/10/2011	12:33:51 PM	SiCl4 post valve closed
11/10/2011	12:33:51 PM	Main Vac valve closed
11/10/2011	12:33:51 PM	Bypass valve closed
11/10/2011	12:33:51 PM	Helium valve opened
11/10/2011	12:33:51 PM	Bubbler valve opened
11/10/2011	12:33:51 PM	Helium MFC set to  400.000000
11/10/2011	12:33:51 PM	H2 MFC set to  0.000000
11/10/2011	12:33:51 PM	BCl3 MFC set to  0.000000
11/10/2011	12:33:51 PM	PHl3 MFC set to  0.000000
11/10/2011	12:33:51 PM	SiCl4 MFC set to  0.000000
11/10/2011	12:33:51 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	12:33:51 PM	Tube furnace set to 0
11/10/2011	1:03:51 PM	Helium valve closed
11/10/2011	1:03:51 PM	H2 valve closed
11/10/2011	1:03:51 PM	BCl3 valve closed
11/10/2011	1:03:51 PM	PH3 valve closed
11/10/2011	1:03:51 PM	SiCl4 pre valve closed
11/10/2011	1:03:51 PM	SiCl4 post valve closed
11/10/2011	1:03:51 PM	Main Vac valve closed
11/10/2011	1:03:51 PM	Bypass valve closed
11/10/2011	1:03:51 PM	Bubbler valve closed
11/10/2011	1:03:51 PM	Helium MFC set to  0.000000
11/10/2011	1:03:51 PM	H2 MFC set to  0.000000
11/10/2011	1:03:51 PM	BCl3 MFC set to  0.000000
11/10/2011	1:03:51 PM	PHl3 MFC set to  0.000000
11/10/2011	1:03:51 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:03:51 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:03:51 PM	Tube furnace set to 0
11/10/2011	1:08:51 PM	Helium valve closed
11/10/2011	1:08:51 PM	H2 valve closed
11/10/2011	1:08:51 PM	BCl3 valve closed
11/10/2011	1:08:51 PM	PH3 valve closed
11/10/2011	1:08:51 PM	SiCl4 pre valve closed
11/10/2011	1:08:51 PM	SiCl4 post valve closed
11/10/2011	1:08:51 PM	Main Vac valve closed
11/10/2011	1:08:51 PM	Bubbler valve closed
11/10/2011	1:08:51 PM	Bypass valve opened
11/10/2011	1:08:51 PM	Helium MFC set to  0.000000
11/10/2011	1:08:51 PM	H2 MFC set to  0.000000
11/10/2011	1:08:51 PM	BCl3 MFC set to  0.000000
11/10/2011	1:08:51 PM	PHl3 MFC set to  0.000000
11/10/2011	1:08:51 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:08:51 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:08:51 PM	Tube furnace set to 0
11/10/2011	1:09:50 PM	Helium valve closed
11/10/2011	1:09:50 PM	H2 valve closed
11/10/2011	1:09:50 PM	BCl3 valve closed
11/10/2011	1:09:50 PM	PH3 valve closed
11/10/2011	1:09:50 PM	SiCl4 pre valve closed
11/10/2011	1:09:50 PM	SiCl4 post valve closed
11/10/2011	1:09:50 PM	Main Vac valve closed
11/10/2011	1:09:50 PM	Bubbler valve closed
11/10/2011	1:09:50 PM	Bypass valve opened
11/10/2011	1:09:50 PM	Helium MFC set to  0.000000
11/10/2011	1:09:50 PM	H2 MFC set to  0.000000
11/10/2011	1:09:50 PM	BCl3 MFC set to  0.000000
11/10/2011	1:09:50 PM	PHl3 MFC set to  0.000000
11/10/2011	1:09:50 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:09:50 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:09:50 PM	Tube furnace set to 0
11/10/2011	1:12:50 PM	Helium valve closed
11/10/2011	1:12:50 PM	H2 valve closed
11/10/2011	1:12:50 PM	BCl3 valve closed
11/10/2011	1:12:50 PM	PH3 valve closed
11/10/2011	1:12:50 PM	SiCl4 pre valve closed
11/10/2011	1:12:50 PM	SiCl4 post valve closed
11/10/2011	1:12:50 PM	Bypass valve closed
11/10/2011	1:12:50 PM	Bubbler valve closed
11/10/2011	1:12:50 PM	Main Vac valve opened
11/10/2011	1:12:50 PM	Helium MFC set to  0.000000
11/10/2011	1:12:50 PM	H2 MFC set to  0.000000
11/10/2011	1:12:50 PM	BCl3 MFC set to  0.000000
11/10/2011	1:12:50 PM	PHl3 MFC set to  0.000000
11/10/2011	1:12:50 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:12:50 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:12:50 PM	Tube furnace set to 0
11/10/2011	1:12:51 PM	Run finished at 1:12 PM
11/10/2011	1:16:41 PM	Main Vac valve closed
11/10/2011	1:23:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	1:23:10 PM	Recipe started at 1:23 PM
11/10/2011	1:23:10 PM	Helium valve closed
11/10/2011	1:23:10 PM	H2 valve closed
11/10/2011	1:23:10 PM	BCl3 valve closed
11/10/2011	1:23:10 PM	PH3 valve closed
11/10/2011	1:23:10 PM	SiCl4 pre valve closed
11/10/2011	1:23:10 PM	SiCl4 post valve closed
11/10/2011	1:23:10 PM	Main Vac valve closed
11/10/2011	1:23:10 PM	Bubbler valve closed
11/10/2011	1:23:10 PM	Bypass valve opened
11/10/2011	1:23:10 PM	Helium MFC set to  0.000000
11/10/2011	1:23:10 PM	H2 MFC set to  0.000000
11/10/2011	1:23:10 PM	BCl3 MFC set to  0.000000
11/10/2011	1:23:10 PM	PHl3 MFC set to  0.000000
11/10/2011	1:23:10 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:23:10 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:23:10 PM	Tube furnace set to 0
11/10/2011	1:25:10 PM	Helium valve closed
11/10/2011	1:25:10 PM	H2 valve closed
11/10/2011	1:25:10 PM	BCl3 valve closed
11/10/2011	1:25:10 PM	PH3 valve closed
11/10/2011	1:25:10 PM	SiCl4 pre valve closed
11/10/2011	1:25:10 PM	SiCl4 post valve closed
11/10/2011	1:25:10 PM	Main Vac valve closed
11/10/2011	1:25:10 PM	Bubbler valve closed
11/10/2011	1:25:10 PM	Bypass valve opened
11/10/2011	1:25:10 PM	Helium MFC set to  0.000000
11/10/2011	1:25:10 PM	H2 MFC set to  0.000000
11/10/2011	1:25:10 PM	BCl3 MFC set to  0.000000
11/10/2011	1:25:10 PM	PHl3 MFC set to  0.000000
11/10/2011	1:25:10 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:25:10 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:25:10 PM	Tube furnace set to 0
11/10/2011	1:26:10 PM	Helium valve closed
11/10/2011	1:26:10 PM	H2 valve closed
11/10/2011	1:26:10 PM	BCl3 valve closed
11/10/2011	1:26:10 PM	PH3 valve closed
11/10/2011	1:26:10 PM	SiCl4 pre valve closed
11/10/2011	1:26:10 PM	SiCl4 post valve closed
11/10/2011	1:26:10 PM	Bypass valve closed
11/10/2011	1:26:10 PM	Bubbler valve closed
11/10/2011	1:26:10 PM	Main Vac valve opened
11/10/2011	1:26:10 PM	Helium MFC set to  0.000000
11/10/2011	1:26:10 PM	H2 MFC set to  0.000000
11/10/2011	1:26:10 PM	BCl3 MFC set to  0.000000
11/10/2011	1:26:10 PM	PHl3 MFC set to  0.000000
11/10/2011	1:26:10 PM	SiCl4 MFC set to  0.000000
11/10/2011	1:26:10 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	1:26:11 PM	Tube furnace set to 0
11/10/2011	1:26:12 PM	Run finished at 1:26 PM
11/10/2011	1:26:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	2:47:45 PM	Recipe started at 2:47 PM
11/10/2011	2:47:45 PM	Helium valve closed
11/10/2011	2:47:45 PM	H2 valve closed
11/10/2011	2:47:45 PM	BCl3 valve closed
11/10/2011	2:47:45 PM	PH3 valve closed
11/10/2011	2:47:45 PM	SiCl4 pre valve closed
11/10/2011	2:47:45 PM	SiCl4 post valve closed
11/10/2011	2:47:45 PM	Main Vac valve closed
11/10/2011	2:47:45 PM	Bypass valve closed
11/10/2011	2:47:45 PM	Bubbler valve closed
11/10/2011	2:47:45 PM	Helium MFC set to  0.000000
11/10/2011	2:47:45 PM	H2 MFC set to  0.000000
11/10/2011	2:47:45 PM	BCl3 MFC set to  0.000000
11/10/2011	2:47:45 PM	PHl3 MFC set to  0.000000
11/10/2011	2:47:45 PM	SiCl4 MFC set to  0.000000
11/10/2011	2:47:45 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	2:47:45 PM	Tube furnace set to 0
11/10/2011	2:47:48 PM	Helium valve closed
11/10/2011	2:47:48 PM	BCl3 valve closed
11/10/2011	2:47:48 PM	PH3 valve closed
11/10/2011	2:47:48 PM	SiCl4 pre valve closed
11/10/2011	2:47:48 PM	SiCl4 post valve closed
11/10/2011	2:47:48 PM	Main Vac valve closed
11/10/2011	2:47:48 PM	Bypass valve closed
11/10/2011	2:47:48 PM	Bubbler valve closed
11/10/2011	2:47:48 PM	H2 valve opened
11/10/2011	2:47:48 PM	Helium MFC set to  0.000000
11/10/2011	2:47:48 PM	H2 MFC set to  500.000000
11/10/2011	2:47:48 PM	BCl3 MFC set to  0.000000
11/10/2011	2:47:48 PM	PHl3 MFC set to  0.000000
11/10/2011	2:47:48 PM	SiCl4 MFC set to  0.000000
11/10/2011	2:47:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	2:47:49 PM	Tube furnace set to 100
11/10/2011	2:48:56 PM	Helium valve closed
11/10/2011	2:48:56 PM	BCl3 valve closed
11/10/2011	2:48:56 PM	PH3 valve closed
11/10/2011	2:48:56 PM	SiCl4 pre valve closed
11/10/2011	2:48:56 PM	SiCl4 post valve closed
11/10/2011	2:48:56 PM	Main Vac valve closed
11/10/2011	2:48:56 PM	Bypass valve closed
11/10/2011	2:48:56 PM	H2 valve opened
11/10/2011	2:48:56 PM	Bubbler valve opened
11/10/2011	2:48:56 PM	Helium MFC set to  0.000000
11/10/2011	2:48:56 PM	H2 MFC set to  500.000000
11/10/2011	2:48:56 PM	BCl3 MFC set to  0.000000
11/10/2011	2:48:56 PM	PHl3 MFC set to  0.000000
11/10/2011	2:48:56 PM	SiCl4 MFC set to  0.000000
11/10/2011	2:48:56 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	2:48:57 PM	Tube furnace set to 1000
11/10/2011	2:48:58 PM	Helium valve closed
11/10/2011	2:48:58 PM	BCl3 valve closed
11/10/2011	2:48:58 PM	PH3 valve closed
11/10/2011	2:48:58 PM	SiCl4 pre valve closed
11/10/2011	2:48:58 PM	SiCl4 post valve closed
11/10/2011	2:48:58 PM	Main Vac valve closed
11/10/2011	2:48:58 PM	Bypass valve closed
11/10/2011	2:48:58 PM	H2 valve opened
11/10/2011	2:48:58 PM	Bubbler valve opened
11/10/2011	2:48:58 PM	Helium MFC set to  0.000000
11/10/2011	2:48:58 PM	H2 MFC set to  500.000000
11/10/2011	2:48:58 PM	BCl3 MFC set to  0.000000
11/10/2011	2:48:58 PM	PHl3 MFC set to  0.000000
11/10/2011	2:48:58 PM	SiCl4 MFC set to  0.000000
11/10/2011	2:48:58 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	2:48:58 PM	Tube furnace set to 1000
11/10/2011	3:10:58 PM	Helium valve closed
11/10/2011	3:10:58 PM	BCl3 valve closed
11/10/2011	3:10:58 PM	PH3 valve closed
11/10/2011	3:10:58 PM	Main Vac valve closed
11/10/2011	3:10:58 PM	Bypass valve closed
11/10/2011	3:10:58 PM	H2 valve opened
11/10/2011	3:10:58 PM	SiCl4 pre valve opened
11/10/2011	3:10:58 PM	SiCl4 post valve opened
11/10/2011	3:10:58 PM	Bubbler valve opened
11/10/2011	3:10:58 PM	Helium MFC set to  0.000000
11/10/2011	3:10:58 PM	H2 MFC set to  500.000000
11/10/2011	3:10:58 PM	BCl3 MFC set to  0.000000
11/10/2011	3:10:58 PM	PHl3 MFC set to  0.000000
11/10/2011	3:10:58 PM	SiCl4 MFC set to  28.000000
11/10/2011	3:10:58 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	3:10:58 PM	Tube furnace set to 1000
11/10/2011	3:44:18 PM	Helium valve closed
11/10/2011	3:44:18 PM	BCl3 valve closed
11/10/2011	3:44:18 PM	PH3 valve closed
11/10/2011	3:44:18 PM	SiCl4 pre valve closed
11/10/2011	3:44:18 PM	SiCl4 post valve closed
11/10/2011	3:44:18 PM	Main Vac valve closed
11/10/2011	3:44:18 PM	Bypass valve closed
11/10/2011	3:44:18 PM	H2 valve opened
11/10/2011	3:44:18 PM	Bubbler valve opened
11/10/2011	3:44:18 PM	Helium MFC set to  0.000000
11/10/2011	3:44:18 PM	H2 MFC set to  500.000000
11/10/2011	3:44:18 PM	BCl3 MFC set to  0.000000
11/10/2011	3:44:18 PM	PHl3 MFC set to  0.000000
11/10/2011	3:44:18 PM	SiCl4 MFC set to  0.000000
11/10/2011	3:44:18 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	3:44:18 PM	Tube furnace set to 950
11/10/2011	3:49:18 PM	Helium valve closed
11/10/2011	3:49:18 PM	BCl3 valve closed
11/10/2011	3:49:18 PM	PH3 valve closed
11/10/2011	3:49:18 PM	SiCl4 pre valve closed
11/10/2011	3:49:18 PM	SiCl4 post valve closed
11/10/2011	3:49:18 PM	Main Vac valve closed
11/10/2011	3:49:18 PM	Bypass valve closed
11/10/2011	3:49:18 PM	H2 valve opened
11/10/2011	3:49:18 PM	Bubbler valve opened
11/10/2011	3:49:18 PM	Helium MFC set to  0.000000
11/10/2011	3:49:18 PM	H2 MFC set to  500.000000
11/10/2011	3:49:18 PM	BCl3 MFC set to  0.000000
11/10/2011	3:49:18 PM	PHl3 MFC set to  0.000000
11/10/2011	3:49:18 PM	SiCl4 MFC set to  0.000000
11/10/2011	3:49:18 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	3:49:18 PM	Tube furnace set to 750
11/10/2011	3:54:18 PM	Helium valve closed
11/10/2011	3:54:18 PM	BCl3 valve closed
11/10/2011	3:54:18 PM	PH3 valve closed
11/10/2011	3:54:18 PM	SiCl4 pre valve closed
11/10/2011	3:54:18 PM	SiCl4 post valve closed
11/10/2011	3:54:18 PM	Main Vac valve closed
11/10/2011	3:54:18 PM	Bypass valve closed
11/10/2011	3:54:18 PM	H2 valve opened
11/10/2011	3:54:18 PM	Bubbler valve opened
11/10/2011	3:54:18 PM	Helium MFC set to  0.000000
11/10/2011	3:54:18 PM	H2 MFC set to  500.000000
11/10/2011	3:54:18 PM	BCl3 MFC set to  0.000000
11/10/2011	3:54:18 PM	PHl3 MFC set to  0.000000
11/10/2011	3:54:18 PM	SiCl4 MFC set to  0.000000
11/10/2011	3:54:18 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	3:54:18 PM	Tube furnace set to 750
11/10/2011	3:59:18 PM	H2 valve closed
11/10/2011	3:59:18 PM	BCl3 valve closed
11/10/2011	3:59:18 PM	PH3 valve closed
11/10/2011	3:59:18 PM	SiCl4 pre valve closed
11/10/2011	3:59:18 PM	SiCl4 post valve closed
11/10/2011	3:59:18 PM	Main Vac valve closed
11/10/2011	3:59:18 PM	Bypass valve closed
11/10/2011	3:59:18 PM	Helium valve opened
11/10/2011	3:59:18 PM	Bubbler valve opened
11/10/2011	3:59:18 PM	Helium MFC set to  400.000000
11/10/2011	3:59:18 PM	H2 MFC set to  0.000000
11/10/2011	3:59:18 PM	BCl3 MFC set to  0.000000
11/10/2011	3:59:18 PM	PHl3 MFC set to  0.000000
11/10/2011	3:59:18 PM	SiCl4 MFC set to  0.000000
11/10/2011	3:59:18 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	3:59:19 PM	Tube furnace set to 0
11/10/2011	4:27:39 PM	Run aborted at 4:27 PM
11/10/2011	4:27:39 PM	Helium valve closed
11/10/2011	4:27:39 PM	H2 valve closed
11/10/2011	4:27:39 PM	BCl3 valve closed
11/10/2011	4:27:39 PM	PH3 valve closed
11/10/2011	4:27:39 PM	SiCl4 pre valve closed
11/10/2011	4:27:39 PM	SiCl4 post valve closed
11/10/2011	4:27:39 PM	Bypass valve closed
11/10/2011	4:27:39 PM	Main Vac valve closed
11/10/2011	4:27:39 PM	Bubbler valve closed
11/10/2011	4:27:39 PM	Helium MFC set to  0.000000
11/10/2011	4:27:39 PM	H2 MFC set to  0.000000
11/10/2011	4:27:39 PM	BCl3 MFC set to  0.000000
11/10/2011	4:27:39 PM	PHl3 MFC set to  0.000000
11/10/2011	4:27:39 PM	SiCl4 MFC set to  0.000000
11/10/2011	4:27:40 PM	Tube furnace set to 0
11/10/2011	4:32:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	4:32:10 PM	Recipe started at 4:32 PM
11/10/2011	4:32:10 PM	Helium valve closed
11/10/2011	4:32:10 PM	H2 valve closed
11/10/2011	4:32:10 PM	BCl3 valve closed
11/10/2011	4:32:10 PM	PH3 valve closed
11/10/2011	4:32:10 PM	SiCl4 pre valve closed
11/10/2011	4:32:10 PM	SiCl4 post valve closed
11/10/2011	4:32:10 PM	Main Vac valve closed
11/10/2011	4:32:10 PM	Bubbler valve closed
11/10/2011	4:32:10 PM	Bypass valve opened
11/10/2011	4:32:10 PM	Helium MFC set to  0.000000
11/10/2011	4:32:10 PM	H2 MFC set to  0.000000
11/10/2011	4:32:10 PM	BCl3 MFC set to  0.000000
11/10/2011	4:32:10 PM	PHl3 MFC set to  0.000000
11/10/2011	4:32:10 PM	SiCl4 MFC set to  0.000000
11/10/2011	4:32:10 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	4:32:10 PM	Tube furnace set to 0
11/10/2011	4:33:17 PM	Helium valve closed
11/10/2011	4:33:17 PM	H2 valve closed
11/10/2011	4:33:17 PM	BCl3 valve closed
11/10/2011	4:33:17 PM	PH3 valve closed
11/10/2011	4:33:17 PM	SiCl4 pre valve closed
11/10/2011	4:33:17 PM	SiCl4 post valve closed
11/10/2011	4:33:17 PM	Main Vac valve closed
11/10/2011	4:33:17 PM	Bubbler valve closed
11/10/2011	4:33:17 PM	Bypass valve opened
11/10/2011	4:33:17 PM	Helium MFC set to  0.000000
11/10/2011	4:33:17 PM	H2 MFC set to  0.000000
11/10/2011	4:33:17 PM	BCl3 MFC set to  0.000000
11/10/2011	4:33:17 PM	PHl3 MFC set to  0.000000
11/10/2011	4:33:17 PM	SiCl4 MFC set to  0.000000
11/10/2011	4:33:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	4:33:17 PM	Tube furnace set to 0
11/10/2011	4:34:17 PM	Helium valve closed
11/10/2011	4:34:17 PM	H2 valve closed
11/10/2011	4:34:17 PM	BCl3 valve closed
11/10/2011	4:34:17 PM	PH3 valve closed
11/10/2011	4:34:17 PM	SiCl4 pre valve closed
11/10/2011	4:34:17 PM	SiCl4 post valve closed
11/10/2011	4:34:17 PM	Bypass valve closed
11/10/2011	4:34:17 PM	Bubbler valve closed
11/10/2011	4:34:17 PM	Main Vac valve opened
11/10/2011	4:34:17 PM	Helium MFC set to  0.000000
11/10/2011	4:34:17 PM	H2 MFC set to  0.000000
11/10/2011	4:34:17 PM	BCl3 MFC set to  0.000000
11/10/2011	4:34:17 PM	PHl3 MFC set to  0.000000
11/10/2011	4:34:17 PM	SiCl4 MFC set to  0.000000
11/10/2011	4:34:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	4:34:17 PM	Tube furnace set to 0
11/10/2011	4:34:18 PM	Run finished at 4:34 PM
11/10/2011	4:34:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	5:38:05 PM	Recipe started at 5:38 PM
11/10/2011	5:38:05 PM	Helium valve closed
11/10/2011	5:38:05 PM	H2 valve closed
11/10/2011	5:38:05 PM	BCl3 valve closed
11/10/2011	5:38:05 PM	PH3 valve closed
11/10/2011	5:38:05 PM	SiCl4 pre valve closed
11/10/2011	5:38:05 PM	SiCl4 post valve closed
11/10/2011	5:38:05 PM	Main Vac valve closed
11/10/2011	5:38:05 PM	Bypass valve closed
11/10/2011	5:38:05 PM	Bubbler valve closed
11/10/2011	5:38:05 PM	Helium MFC set to  0.000000
11/10/2011	5:38:05 PM	H2 MFC set to  0.000000
11/10/2011	5:38:05 PM	BCl3 MFC set to  0.000000
11/10/2011	5:38:05 PM	PHl3 MFC set to  0.000000
11/10/2011	5:38:05 PM	SiCl4 MFC set to  0.000000
11/10/2011	5:38:05 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	5:38:05 PM	Tube furnace set to 0
11/10/2011	5:38:08 PM	Helium valve closed
11/10/2011	5:38:08 PM	BCl3 valve closed
11/10/2011	5:38:08 PM	PH3 valve closed
11/10/2011	5:38:08 PM	SiCl4 pre valve closed
11/10/2011	5:38:08 PM	SiCl4 post valve closed
11/10/2011	5:38:08 PM	Main Vac valve closed
11/10/2011	5:38:08 PM	Bypass valve closed
11/10/2011	5:38:08 PM	Bubbler valve closed
11/10/2011	5:38:08 PM	H2 valve opened
11/10/2011	5:38:08 PM	Helium MFC set to  0.000000
11/10/2011	5:38:08 PM	H2 MFC set to  500.000000
11/10/2011	5:38:08 PM	BCl3 MFC set to  0.000000
11/10/2011	5:38:08 PM	PHl3 MFC set to  0.000000
11/10/2011	5:38:08 PM	SiCl4 MFC set to  0.000000
11/10/2011	5:38:08 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	5:38:08 PM	Tube furnace set to 100
11/10/2011	5:39:17 PM	Helium valve closed
11/10/2011	5:39:17 PM	BCl3 valve closed
11/10/2011	5:39:17 PM	PH3 valve closed
11/10/2011	5:39:17 PM	SiCl4 pre valve closed
11/10/2011	5:39:17 PM	SiCl4 post valve closed
11/10/2011	5:39:17 PM	Main Vac valve closed
11/10/2011	5:39:17 PM	Bypass valve closed
11/10/2011	5:39:17 PM	H2 valve opened
11/10/2011	5:39:17 PM	Bubbler valve opened
11/10/2011	5:39:17 PM	Helium MFC set to  0.000000
11/10/2011	5:39:17 PM	H2 MFC set to  500.000000
11/10/2011	5:39:17 PM	BCl3 MFC set to  0.000000
11/10/2011	5:39:17 PM	PHl3 MFC set to  0.000000
11/10/2011	5:39:17 PM	SiCl4 MFC set to  0.000000
11/10/2011	5:39:17 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	5:39:17 PM	Tube furnace set to 1000
11/10/2011	5:39:18 PM	Helium valve closed
11/10/2011	5:39:18 PM	BCl3 valve closed
11/10/2011	5:39:18 PM	PH3 valve closed
11/10/2011	5:39:18 PM	SiCl4 pre valve closed
11/10/2011	5:39:18 PM	SiCl4 post valve closed
11/10/2011	5:39:18 PM	Main Vac valve closed
11/10/2011	5:39:18 PM	Bypass valve closed
11/10/2011	5:39:18 PM	H2 valve opened
11/10/2011	5:39:18 PM	Bubbler valve opened
11/10/2011	5:39:18 PM	Helium MFC set to  0.000000
11/10/2011	5:39:18 PM	H2 MFC set to  500.000000
11/10/2011	5:39:18 PM	BCl3 MFC set to  0.000000
11/10/2011	5:39:18 PM	PHl3 MFC set to  0.000000
11/10/2011	5:39:18 PM	SiCl4 MFC set to  0.000000
11/10/2011	5:39:18 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	5:39:19 PM	Tube furnace set to 1000
11/10/2011	6:01:19 PM	Helium valve closed
11/10/2011	6:01:19 PM	BCl3 valve closed
11/10/2011	6:01:19 PM	PH3 valve closed
11/10/2011	6:01:19 PM	Main Vac valve closed
11/10/2011	6:01:19 PM	Bypass valve closed
11/10/2011	6:01:19 PM	H2 valve opened
11/10/2011	6:01:19 PM	SiCl4 pre valve opened
11/10/2011	6:01:19 PM	SiCl4 post valve opened
11/10/2011	6:01:19 PM	Bubbler valve opened
11/10/2011	6:01:19 PM	Helium MFC set to  0.000000
11/10/2011	6:01:19 PM	H2 MFC set to  500.000000
11/10/2011	6:01:19 PM	BCl3 MFC set to  0.000000
11/10/2011	6:01:19 PM	PHl3 MFC set to  0.000000
11/10/2011	6:01:19 PM	SiCl4 MFC set to  26.000000
11/10/2011	6:01:19 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	6:01:19 PM	Tube furnace set to 1000
11/10/2011	6:41:19 PM	Helium valve closed
11/10/2011	6:41:19 PM	BCl3 valve closed
11/10/2011	6:41:19 PM	PH3 valve closed
11/10/2011	6:41:19 PM	SiCl4 pre valve closed
11/10/2011	6:41:19 PM	SiCl4 post valve closed
11/10/2011	6:41:19 PM	Main Vac valve closed
11/10/2011	6:41:19 PM	Bypass valve closed
11/10/2011	6:41:19 PM	H2 valve opened
11/10/2011	6:41:19 PM	Bubbler valve opened
11/10/2011	6:41:19 PM	Helium MFC set to  0.000000
11/10/2011	6:41:19 PM	H2 MFC set to  500.000000
11/10/2011	6:41:19 PM	BCl3 MFC set to  0.000000
11/10/2011	6:41:19 PM	PHl3 MFC set to  0.000000
11/10/2011	6:41:19 PM	SiCl4 MFC set to  0.000000
11/10/2011	6:41:19 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	6:41:19 PM	Tube furnace set to 950
11/10/2011	6:46:19 PM	Helium valve closed
11/10/2011	6:46:19 PM	BCl3 valve closed
11/10/2011	6:46:19 PM	PH3 valve closed
11/10/2011	6:46:19 PM	SiCl4 pre valve closed
11/10/2011	6:46:19 PM	SiCl4 post valve closed
11/10/2011	6:46:19 PM	Main Vac valve closed
11/10/2011	6:46:19 PM	Bypass valve closed
11/10/2011	6:46:19 PM	H2 valve opened
11/10/2011	6:46:19 PM	Bubbler valve opened
11/10/2011	6:46:19 PM	Helium MFC set to  0.000000
11/10/2011	6:46:19 PM	H2 MFC set to  500.000000
11/10/2011	6:46:19 PM	BCl3 MFC set to  0.000000
11/10/2011	6:46:19 PM	PHl3 MFC set to  0.000000
11/10/2011	6:46:19 PM	SiCl4 MFC set to  0.000000
11/10/2011	6:46:19 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	6:46:19 PM	Tube furnace set to 750
11/10/2011	6:51:19 PM	Helium valve closed
11/10/2011	6:51:19 PM	BCl3 valve closed
11/10/2011	6:51:19 PM	PH3 valve closed
11/10/2011	6:51:19 PM	SiCl4 pre valve closed
11/10/2011	6:51:19 PM	SiCl4 post valve closed
11/10/2011	6:51:19 PM	Main Vac valve closed
11/10/2011	6:51:19 PM	Bypass valve closed
11/10/2011	6:51:19 PM	H2 valve opened
11/10/2011	6:51:19 PM	Bubbler valve opened
11/10/2011	6:51:19 PM	Helium MFC set to  0.000000
11/10/2011	6:51:19 PM	H2 MFC set to  500.000000
11/10/2011	6:51:19 PM	BCl3 MFC set to  0.000000
11/10/2011	6:51:19 PM	PHl3 MFC set to  0.000000
11/10/2011	6:51:19 PM	SiCl4 MFC set to  0.000000
11/10/2011	6:51:19 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	6:51:19 PM	Tube furnace set to 750
11/10/2011	6:56:19 PM	H2 valve closed
11/10/2011	6:56:19 PM	BCl3 valve closed
11/10/2011	6:56:19 PM	PH3 valve closed
11/10/2011	6:56:19 PM	SiCl4 pre valve closed
11/10/2011	6:56:19 PM	SiCl4 post valve closed
11/10/2011	6:56:19 PM	Main Vac valve closed
11/10/2011	6:56:19 PM	Bypass valve closed
11/10/2011	6:56:19 PM	Helium valve opened
11/10/2011	6:56:19 PM	Bubbler valve opened
11/10/2011	6:56:19 PM	Helium MFC set to  400.000000
11/10/2011	6:56:19 PM	H2 MFC set to  0.000000
11/10/2011	6:56:19 PM	BCl3 MFC set to  0.000000
11/10/2011	6:56:19 PM	PHl3 MFC set to  0.000000
11/10/2011	6:56:19 PM	SiCl4 MFC set to  0.000000
11/10/2011	6:56:19 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	6:56:19 PM	Tube furnace set to 0
11/10/2011	7:23:43 PM	Run aborted at 7:23 PM
11/10/2011	7:23:43 PM	Helium valve closed
11/10/2011	7:23:43 PM	H2 valve closed
11/10/2011	7:23:43 PM	BCl3 valve closed
11/10/2011	7:23:43 PM	PH3 valve closed
11/10/2011	7:23:43 PM	SiCl4 pre valve closed
11/10/2011	7:23:43 PM	SiCl4 post valve closed
11/10/2011	7:23:43 PM	Bypass valve closed
11/10/2011	7:23:43 PM	Main Vac valve closed
11/10/2011	7:23:43 PM	Bubbler valve closed
11/10/2011	7:23:43 PM	Helium MFC set to  0.000000
11/10/2011	7:23:43 PM	H2 MFC set to  0.000000
11/10/2011	7:23:43 PM	BCl3 MFC set to  0.000000
11/10/2011	7:23:43 PM	PHl3 MFC set to  0.000000
11/10/2011	7:23:43 PM	SiCl4 MFC set to  0.000000
11/10/2011	7:23:43 PM	Tube furnace set to 0
11/10/2011	7:25:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/10/2011	7:25:47 PM	Recipe started at 7:25 PM
11/10/2011	7:25:48 PM	Helium valve closed
11/10/2011	7:25:48 PM	H2 valve closed
11/10/2011	7:25:48 PM	BCl3 valve closed
11/10/2011	7:25:48 PM	PH3 valve closed
11/10/2011	7:25:48 PM	SiCl4 pre valve closed
11/10/2011	7:25:48 PM	SiCl4 post valve closed
11/10/2011	7:25:48 PM	Main Vac valve closed
11/10/2011	7:25:48 PM	Bubbler valve closed
11/10/2011	7:25:48 PM	Bypass valve opened
11/10/2011	7:25:48 PM	Helium MFC set to  0.000000
11/10/2011	7:25:48 PM	H2 MFC set to  0.000000
11/10/2011	7:25:48 PM	BCl3 MFC set to  0.000000
11/10/2011	7:25:48 PM	PHl3 MFC set to  0.000000
11/10/2011	7:25:48 PM	SiCl4 MFC set to  0.000000
11/10/2011	7:25:48 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	7:25:48 PM	Tube furnace set to 0
11/10/2011	7:26:54 PM	Helium valve closed
11/10/2011	7:26:54 PM	H2 valve closed
11/10/2011	7:26:54 PM	BCl3 valve closed
11/10/2011	7:26:54 PM	PH3 valve closed
11/10/2011	7:26:54 PM	SiCl4 pre valve closed
11/10/2011	7:26:54 PM	SiCl4 post valve closed
11/10/2011	7:26:54 PM	Main Vac valve closed
11/10/2011	7:26:54 PM	Bubbler valve closed
11/10/2011	7:26:54 PM	Bypass valve opened
11/10/2011	7:26:54 PM	Helium MFC set to  0.000000
11/10/2011	7:26:54 PM	H2 MFC set to  0.000000
11/10/2011	7:26:54 PM	BCl3 MFC set to  0.000000
11/10/2011	7:26:54 PM	PHl3 MFC set to  0.000000
11/10/2011	7:26:54 PM	SiCl4 MFC set to  0.000000
11/10/2011	7:26:54 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	7:26:54 PM	Tube furnace set to 0
11/10/2011	7:27:54 PM	Helium valve closed
11/10/2011	7:27:54 PM	H2 valve closed
11/10/2011	7:27:54 PM	BCl3 valve closed
11/10/2011	7:27:54 PM	PH3 valve closed
11/10/2011	7:27:54 PM	SiCl4 pre valve closed
11/10/2011	7:27:54 PM	SiCl4 post valve closed
11/10/2011	7:27:54 PM	Bypass valve closed
11/10/2011	7:27:54 PM	Bubbler valve closed
11/10/2011	7:27:54 PM	Main Vac valve opened
11/10/2011	7:27:54 PM	Helium MFC set to  0.000000
11/10/2011	7:27:54 PM	H2 MFC set to  0.000000
11/10/2011	7:27:54 PM	BCl3 MFC set to  0.000000
11/10/2011	7:27:54 PM	PHl3 MFC set to  0.000000
11/10/2011	7:27:54 PM	SiCl4 MFC set to  0.000000
11/10/2011	7:27:54 PM	Bypass solenoid MFC set to  0.000000
11/10/2011	7:27:54 PM	Tube furnace set to 0
11/10/2011	7:27:55 PM	Run finished at 7:27 PM
11/10/2011	7:27:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
